Titanium Sputtering Lub Hom Phiaj Nrog Siab Purity

Titanium sputtering lub hom phiaj nrog siab purityyog sputtering qhov chaw uas tsim ntau yam ua hauj lwm nyias zaj duab xis ntawm substrates los ntawm magnetron sputtering, multi-arc ion plating los yog lwm yam txheej txheem txheej txheem raws li cov txheej txheem tsim nyog. Cias muab, cov khoom siv yog lub hom phiaj cov khoom siv foob pob los ntawm cov khoom siv hluav taws xob ceev ceev.

Nws yog siv nyob rau hauv high-zog laser riam phom. Thaum lasers nrog lub zog sib txawv, qhov sib txawv ntawm cov zis waveforms, thiab qhov sib txawv wavelengths cuam tshuam nrog cov hom phiaj sib txawv, lawv yuav tsim kev tua thiab kev puas tsuaj. nyhuv. Piv txwv li: evaporation magnetron sputtering txheej yog cua sov evaporation txheej, aluminium zaj duab xis thiab lwm yam. Los ntawm kev hloov cov ntaub ntawv sib txawv (xws li txhuas, tooj liab, stainless hlau, titanium, npib tsib xee lub hom phiaj, thiab lwm yam), cov tshuab sib txawv (xws li superhard, hnav-resistant, anti-corrosion alloy films, thiab lwm yam) tuaj yeem tau.

Tsis muaj

Nta

1. Lub teeb yuag

2. Muaj zog tshwj xeeb

3. Corrosion kuj

4. Kub thiab kub tsis kam

Daim ntawv thov

★Shipbuilding ★Electrolytic Plating ★Aerospace ★ Kev Lag Luam Tshuaj ★ Cov Khoom Siv Kho Mob

Paub meej

Ua los ntawm cov khoom zoo raw khoom, hnav-resistant thiab corrosion-resistant, siv mus sij hawm ntev

Tsis muaj kab nrib pleb ntawm qhov chaw, tsis muaj roj stains, du thiab huv si saum npoo

Ua tiav cov lus qhia tshwj xeeb, txiav txiav txiav, txhawb nqa tsis yog tus qauv tsim kho

Lub purity ntawm lub hom phiaj cov khoom muaj txiaj ntsig zoo rau kev ua haujlwm ntawm cov yeeb yaj kiab. Purity yog ib qho ntawm cov phiaj xwm kev ua tau zoo.

Purity

Purity ntawm lub hom phiaj yog ib qho tseem ceeb ntawm kev ua tau zoo ntawm lub hom phiaj vim hais tias qhov purity ntawm lub hom phiaj zoo heev cuam tshuam rau kev ua tau zoo ntawm cov yeeb yaj kiab. Txawm li cas los xij, hauv kev siv tiag tiag, qhov yuav tsum tau ua rau purity ntawm cov khoom siv lub hom phiaj tsis zoo ib yam. Piv txwv li, nrog kev loj hlob sai ntawm kev lag luam microelectronics Qhov luaj li cas ntawm silicon wafer tau nthuav dav los ntawm 6 ", 8" mus rau 12 ", qhov dav ntawm cov xaim raug txo los ntawm 0.5 um mus rau 0. 25 um, 0.18 um, thiab 0.13 um. Yav dhau los, lub hom phiaj purity yog 99.995 feem pua.

Cov ntsiab lus impurity

Lub hauv paus tseem ceeb ntawm cov yeeb yaj kiab tso tawm yog cov pa oxygen thiab noo noo ntawm lub hom phiaj cov khib nyiab thiab cov pores. Cov hom phiaj rau ntau daim ntawv thov muaj cov kev xav tau sib txawv rau qib impurity sib txawv. Piv txwv li, lub hom phiaj ntawm cov ntshiab aluminium thiab aluminium alloys siv nyob rau hauv kev lag luam semiconductor muaj cov kev cai tshwj xeeb rau cov ntsiab lus ntawm alkali hlau thiab cov ntsiab lus ntawm cov khoom siv hluav taws xob.

Qhov ntom

Txhawm rau txo qhov pores ntawm lub hom phiaj cov khib nyiab thiab txhim kho kev ua haujlwm ntawm cov yeeb yaj kiab sputtered, cov hom phiaj feem ntau yuav tsum tau ua kom nruj dua. Lub hom phiaj ceev tsis yog tsuas yog tus nqi sputtering xwb tab sis kuj yog cov khoom hluav taws xob thiab kho qhov muag ntawm cov yeeb yaj kiab. Qhov siab dua lub hom phiaj ceev, qhov ua tau zoo ntawm zaj duab xis. Ib qho ntxiv, thaum lub hom phiaj ntom thiab siv tau yog tsa, lub hom phiaj tuaj yeem tiv taus lub thermal kev ntxhov siab thaum sib tw. Qhov ceev yog ib qho ntawm cov phiaj xwm kev ua tau zoo.

Cov qoob loo loj thiab loj faib

Feem ntau lub hom phiaj yog polycrystalline, thiab particle loj yuav nyob rau hauv qhov kev txiav txim ntawm micrometers mus millimeter. Nyob rau hauv cov ntaub ntawv ntawm tib lub hom phiaj, lub sputtering tus nqi ntawm cov nplua-grained lub hom phiaj yog sai tshaj qhov sputtering tus nqi ntawm cov ntxhib grained lub hom phiaj, thaum sputter deposition ntawm cov me me particle loj (uniform distribution) lub hom phiaj muaj ib tug uniform thickness faib (uniform) . Kev faib tawm.

Yog tias koj txaus siab rau hauvtitanium sputtering lub hom phiaj nrog siab purity, thov koj xav tiv tauj peb:

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